Decoupling Arrangement

A cost-effective decoupling arrangement for ballscrew drives enables the standard PMT 160 series stages to achieve straightness and flatness runout of 50µm or less. Using mechanical cross roller bearings instead of large and expensive air bearings, the decoupling system isolates any transverse movement of the ballscrew from the linear bearing system and saddle of the stage.

Even though the linear bearings in Steinmeyer's precision stages are dramatically oversized, their stiffness is not infinite. Disturbance forces can elastically deform base plate, bearing and saddle, and interfere in the straightness and flatness of the whole stage system. By applying flexure designs well-known in piezo micro-positioning stages, this solution virtually eliminates these effects.

The technology of decoupling devices is standard in all ballscrew driven PMT 160 series stages from Steinmeyer. The PMT 160 offers travels from 50mm to 300mm, with standard positioning accuracy of less than 10µm and repeatability of ±0.5µm when driven by either DC servomotor (with rotary encoder) or DC stepper motor. Higher accuracies are possible through the use of linear encoders. The PMT series stages can be customized for vacuum and/or cleanroom operations as well. Production proven in thousands of units, they are ideal for applications in semiconductor, inspection, micromachining and other areas where high precision is critical to the application.

IMTS BOOTH D-4057
Steinmeyer Inc.
Burling, MA
steinmeyer.com