3D Measurement in Micros, NanoS

InfiniteFocus is a high resolution optical 3D measurement device for quality assurance in all drilling, milling and cutting processes in the micro- and nano-range. InfiniteFocus provides all functionalities for dimensional measurements, surface analysis and characterization. Complex surface details such as steep flanks and strongly-varying reflective properties are measured with a vertical resolution up to 10µm. The system is used for profile, roughness, volume and area measurements, as well as for form measurement in both the lab and in a production-near environment. Wear and variance analysis of components is also performed. The operating principle combines the small depth of focus of an optical system with vertical scanning to provide topographical and color information from the variation of focus. Novel and unique algorithms reconstruct this into a single 3D data set with accurate topographical information.

InfiniteFocus is based on the technology of Focus-Variation. Its operating principle combines the small depth of focus of an optical system with vertical scanning. This technology has been added to the latest draft of the upcoming ISO standard 25178, which for the first time includes optically-area-based measurements.

Traceable calibration standards allow the verification of measurement results. The instrument can be operated by semi-skilled technicians where required. Automation of functions and analysis can also be added to make the instrument useable for the majority of surface metrology and inspection requirements.